MEMS electro thermal actuators : modeling and simulation /

Abstract

In recent years, MEMS sensors and actuators are getting more attention in daily life application due to its compactness, miniaturization, inexpensive and highly efficient as compare to the other ordinary devices. In this research work ETA is modeled and simulated. Complementary Metal Oxide Semiconductor (CMOS) MEMS technology is used to design, fabricate and characterize ETA using MATLAB and INTELLISUITE software. Micro actuator is used in the wing of micro flying robot and it consist of four supporting beams. For upward movement of micro flying robot, wing is resonated in its first mode of vibration. Beam is made up of polysilicon and aluminum using bimorph actuation mechanism where polysilicon works as heating resistor. In dynamic mode the maximum amplitude of device is 124.15mm with the quality factor of 107.78 at the resonance frequency of 843Hz mathematically. While in simulation maximum amplitude of 97.82mm is obtained with the quality factor of 105.38 at the resonance frequency of 970Hz. The actuation force to drive the cantilever in dynamic mode is 3.26μN mathematically and 4.67μN in simulation. In static mode at 2V the mathematical and simulated results are approximately same, 28.6mW power is used at 2V for the displacement of 129μm.